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Cleanroom solutions up to ISO Class 1

Display robots or in pick-and-place applications in semiconductor manufacturing and microelectronics

Cleanroom environments impose exceptionally strict demands on the abrasion resistance of moving components, as even the smallest particle release can compromise sensitive processes, damage products or lead to costly production interruptions.

To meet these challenges, igus® designs and validates its high‑performance polymer components in a dedicated in‑house cleanroom laboratory, where materials and systems are tested under realistic operating conditions. For additional verification and independent certification, our products undergo further evaluation by the Fraunhofer Institute, ensuring reliable, data‑driven proof of cleanroom suitability.


Cleanroom solutions | compatible products

Cleanroom-compatible e-chain in front of a laboratory background.

e-chains® in a cleanroom environment have to be abrasion-resistant as airborne particles can be released and can contaminate the cleanroom.

Energy chains

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e-skin flat cable guidance system with a flat, wide guide for several cable bundles.

Cables with IPA ISO class 1 and 2 are available ready for connection, suitable for manufacturers such as Bosch Rexroth, Festo, Parker and Siemens

Cables and hoses

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Cleanroom-compatible linear guide in front of a laboratory.

Within our product range of dry-operating linear guide systems, we offer four models that are certified for use in ISO class 6 to 3 cleanrooms.

Linear guides

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Cleanroom-compatible PRT slewing ring bearing in front of a laboratory background.

The sliding elements of the PRT-04-100 slewing ring is made of iglidur J which minimises particle emissions, so they can be used in cleanroom applications.

Slewing ring bearings

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E-Skin cleanroom energy chain with three layers and IPA test passed for cleanroom class 1.

The e-skin® energy chain is specifically produced for cleanroom applications. Variety of variants to choose from depending on the application

e-skin® cleanroom energy chain

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e-skin configurator showing cable chain options and selection icons.

Are you unsure which energy supply is the right one for your application? You can find the suitable solution with just a few clicks.

Configurator

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A microscope processes a semiconductor wafer in a cleanroom setup.
Semiconductor industry
The gripper head positions glass panes in the production process.
Display industry
Illuminated microchip board with blue circuit traces.
Microelectronics

Successful in use in cleanroom applications

Positioning systems in electronics manufacturing

This positioning unit uses a readychain system to reliably guide drive, measuring system, and compressed air lines – 24 hours a day, seven days a week.

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igus automation system with cable carriers and metal assemblies in a technical installation.

Clean energy supply in adhesive dispenser for camera modules

Mingseal uses our e-skin corrugated tube in its adhesive dispenser for camera modules. It combines the engineers' requirements regarding openability, inherent rigidity and compactness combined with the highest cleanroom suitability according to ISO Class 1.

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System in a cleanroom with an automatic dispenser for camera modules.

Filling system in laboratory technology

A clean bottling, which does not have to be sterile, but has to be very clean, and a low overall weight of the system

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Spindle drive of a filling system with motor and threaded lead screw.

Cleanroom 3D printer

Precise, reliable cleanroom 3D printer for processing thermoplastics.

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3D printer in a closed test cell with filament guide and part holder.

Linear system with air bearings for highly precise adjustments

An e-skin flat SKF12.4.03.01.1 as a 4-fold layer together with PVC & TPE cables from igus ensures the reliable energy supply of an air bearing linear system.

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e-skin flat guides cables in an automated system.

Energy supply systems in semiconductor manufacturing

For producing the Fixload, pure air is required. This is due to the very sensitive area of application of the loading interface for 300 mm wafer processing devices in semiconductor production. As the wafers to be processed are exposed to the environment without protection during loading, the technical accessories must not generate any particles.
This is why an abrasion-resistant energy supply is used here, which can be used in ISO class 3 cleanrooms (in accordance with DINE EN ISO 146441-1).

Cleanroom test device with a transparent orange protective housing on a stand.

Wafer handling

With the e-chain® E6, energy supply at accelerations of up to 4 m/s2 at speeds of up to 6 m/s is no problem for wafer handling in chip production.

Wafer handling in a cleanroom with a conveyor belt and transport modules.

cleanroom product brochure

Cleanroom brochure with igus products and applications for clean rooms.

Cleanroom classes of our products as well as information on RoHs and ESD.

Information on ESD

ESD cable chain for cleanrooms with two cable carriers in front of a circuit board background.

More about the igus® material igumid® for ESD applications.

Frequently asked questions

As the quality requirements for cleanroom technology applications are constantly growing, igus® is continuously working on improving its products. For this purpose, igus® has been carrying out tests for cleanroom suitability in its own test laboratory since 1997. In addition, appropriate products are tested externally by the Fraunhofer Institute.

The cleanroom suitability of our iglidur® plain bearings is determined on the basis of the wear particles released in the application. The size and quantity of the released wear particles depend on:
•  the respective pairing of shaft and bearing material
•  further parameters such as load, speed etc.
Therefore, there are no clearly defined cleanroom materials for our plain bearings, but instead they depend on their use.

Consulting

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