Semiconductor manufacturing equipment

Semiconductor manufacturers are striving for high productivity rates. The important overall system effectiveness (OSE) can be increased with solutions from igus®. Our energy supply systems and cables for cleanroom applications support high manufacturing quality. They are made of high-performance polymers that are abrasion-resistant and have low gas release. They are compact, low-maintenance, easy to install and cost-effective. Our semiconductor manufacturing equipment increase OSE in the semiconductor industry worldwide and are used in machines and systems for laser marking, EUV lithography and automatic optical inspection (AOI), among others.
Benefits of igus® products for semiconductor manufacturing:

Suitable for cleanroom and ESD
Compact and light
Cost-effective
Maintenance-free
Low noise and low vibration
Complete system or individual components

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Selected semiconductor manufacturing equipment

Flat cable guidance system

e-skin® flat and CFCLEAN stranded structure
► Cleanroom compatible according to IPA ISO Class 1
► Modular and compact structure
► Replace cables in minutes
► With co-ordinated CFCLEAN stranded structure for high dependability
► Available from stock
► No minimum order quantity

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Customer application examples

e-skin flat in use in a linear system with air bearings

Linear system with air bearings for highly precise adjustments

An e-skin® flat SKF12.4.03.01.1 as a 4-fold layer together with PVC & TPE cables from igus ensures the reliable energy supply of an air bearing linear system.

Cables for the cleanroom, with over 31 million cycles a year

The energy supply in these volume pattern generator systems must run absolutely smoothly in the cleanroom despite continuous operation.
The solution: the e-skin flat

Semiconductor automation system

E6 and E14 series energy chains are used in the production of the Fixload semiconductor automation system. For the sensitive application area of the load interface for 300mm wafer processing equipment, clean air is required. The e-chains® meet the requirements: they are wear-resistant and suitable for cleanrooms of IPA ISO class 2 and 3.